JPH0417376U - - Google Patents

Info

Publication number
JPH0417376U
JPH0417376U JP5589390U JP5589390U JPH0417376U JP H0417376 U JPH0417376 U JP H0417376U JP 5589390 U JP5589390 U JP 5589390U JP 5589390 U JP5589390 U JP 5589390U JP H0417376 U JPH0417376 U JP H0417376U
Authority
JP
Japan
Prior art keywords
tool changer
substrate
tool
control device
mounting table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5589390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0744381Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990055893U priority Critical patent/JPH0744381Y2/ja
Publication of JPH0417376U publication Critical patent/JPH0417376U/ja
Application granted granted Critical
Publication of JPH0744381Y2 publication Critical patent/JPH0744381Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990055893U 1990-05-30 1990-05-30 ツールチェンジャーの位置制御装置 Expired - Lifetime JPH0744381Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990055893U JPH0744381Y2 (ja) 1990-05-30 1990-05-30 ツールチェンジャーの位置制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990055893U JPH0744381Y2 (ja) 1990-05-30 1990-05-30 ツールチェンジャーの位置制御装置

Publications (2)

Publication Number Publication Date
JPH0417376U true JPH0417376U (en]) 1992-02-13
JPH0744381Y2 JPH0744381Y2 (ja) 1995-10-11

Family

ID=31579245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990055893U Expired - Lifetime JPH0744381Y2 (ja) 1990-05-30 1990-05-30 ツールチェンジャーの位置制御装置

Country Status (1)

Country Link
JP (1) JPH0744381Y2 (en])

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629887A (ja) * 1985-07-08 1987-01-17 フアナツク株式会社 自動ハンド交換装置
JPH01166081U (en]) * 1988-05-17 1989-11-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629887A (ja) * 1985-07-08 1987-01-17 フアナツク株式会社 自動ハンド交換装置
JPH01166081U (en]) * 1988-05-17 1989-11-21

Also Published As

Publication number Publication date
JPH0744381Y2 (ja) 1995-10-11

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